From vilanova at snf.stanford.edu Mon Nov 1 09:16:07 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 1 Nov 2010 09:16:07 -0700 Subject: Shutdown svgcoat2 SNF 2010-10-31 17:08:38: Transfer problem Message-ID: reseted MOdule and cycled wafers, theres an intermitent Problem with the wafers lifters, we'll order parts to replace it. From bchui at snf.stanford.edu Mon Nov 1 17:36:13 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 1 Nov 2010 17:36:13 -0700 Subject: Problem svgcoat2 SNF 2010-11-01 17:36:12: loader bad Message-ID: keeps beeping, belt won't load any wafers in from the loading cassette (shows "RMV WAFER FROM PRIME" message even though there are no wafers in the prime station) From ericp at snf.stanford.edu Mon Nov 1 22:07:04 2010 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Mon, 1 Nov 2010 22:07:04 -0700 Subject: Comment svgcoat2 SNF 2010-11-01 22:07:03: To add to Ben's problem report. Message-ID: It looks to me like the actuator for the wafer lift on the prime oven is sticking. It seems to work once it is freed, but I am sure it will stick again, so the issue is still present. From gsosa at snf.stanford.edu Tue Nov 2 08:29:43 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 2 Nov 2010 08:29:43 -0700 Subject: Comment svgcoat2 SNF 2010-11-02 08:29:43: 955 0.7um Thickness 11/2 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(5 points): 6882 Angstroms, Std Dev. 12 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From mahnaz at snf.stanford.edu Tue Nov 2 09:59:00 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 2 Nov 2010 09:59:00 -0700 Subject: Problem svgcoat2 SNF 2010-11-02 09:58:59: EBR centering is out Message-ID: From gsosa at snf.stanford.edu Wed Nov 3 07:26:32 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Nov 2010 07:26:32 -0700 Subject: Shutdown svgcoat2 SNF 2010-11-03 07:26:32: Maintenance work 11/3 Message-ID: Will be replacing the lifter leadscrew assembly. Also will check and adjust wafer centering. From gsosa at snf.stanford.edu Wed Nov 3 11:15:37 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Nov 2010 11:15:37 -0700 Subject: Shutdown svgcoat2 SNF 2010-11-03 07:26:32: Maintenance work 11/3 Message-ID: Wafer lifter on VP module getting stuck sometimes. Replaced the leadscrew assembly/ including drive motor. Tested the lifters under normal operartion- OK. Tested the lifter reset routine with track reset function and power down/up sequence- Lifter function OK. checked wafer centering- OK. From gsosa at snf.stanford.edu Wed Nov 3 11:15:52 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Nov 2010 11:15:52 -0700 Subject: Problem svgcoat2 SNF 2010-11-01 17:36:12: loader bad Message-ID: Wafer lifter on VP module getting stuck sometimes. Replaced the leadscrew assembly/ including drive motor. Tested the lifters under normal operartion- OK. Tested the lifter reset routine with track reset function and power down/up sequence- Lifter function OK. checked wafer centering- OK. From gsosa at snf.stanford.edu Wed Nov 3 11:15:55 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Nov 2010 11:15:55 -0700 Subject: Problem svgcoat2 SNF 2010-11-01 17:36:12: loader bad Message-ID: Wafer lifter on VP module getting stuck sometimes. Replaced the leadscrew assembly/ including drive motor. Tested the lifters under normal operartion- OK. Tested the lifter reset routine with track reset function and power down/up sequence- Lifter function OK. checked wafer centering- OK. From gsosa at snf.stanford.edu Wed Nov 3 11:16:04 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Nov 2010 11:16:04 -0700 Subject: Problem svgcoat2 SNF 2010-11-01 17:36:12: loader bad Message-ID: Wafer lifter on VP module getting stuck sometimes. Replaced the leadscrew assembly/ including drive motor. Tested the lifters under normal operartion- OK. Tested the lifter reset routine with track reset function and power down/up sequence- Lifter function OK. checked wafer centering- OK. From gsosa at snf.stanford.edu Wed Nov 3 11:16:14 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Nov 2010 11:16:14 -0700 Subject: Comment svgcoat2 SNF 2010-11-01 22:07:03: To add to Ben's problem report. Message-ID: Wafer lifter on VP module getting stuck sometimes. Replaced the leadscrew assembly/ including drive motor. Tested the lifters under normal operartion- OK. Tested the lifter reset routine with track reset function and power down/up sequence- Lifter function OK. checked wafer centering- OK. From gsosa at snf.stanford.edu Wed Nov 3 11:16:20 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Nov 2010 11:16:20 -0700 Subject: Problem svgcoat2 SNF 2010-11-02 09:58:59: EBR centering is out Message-ID: Wafer lifter on VP module getting stuck sometimes. Replaced the leadscrew assembly/ including drive motor. Tested the lifters under normal operartion- OK. Tested the lifter reset routine with track reset function and power down/up sequence- Lifter function OK. checked wafer centering- OK. From bchui at snf.stanford.edu Thu Nov 4 17:26:15 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 4 Nov 2010 17:26:15 -0700 Subject: Problem svgcoat2 SNF 2010-11-04 17:26:14: Prime station wafer lifter still sticking Message-ID: Had to pry it up and 'unstick' it before the track started accepting wafers again. From jasonlin at snf.stanford.edu Sun Nov 7 14:35:55 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Sun, 7 Nov 2010 14:35:55 -0800 Subject: Problem svgcoat2 SNF 2010-11-07 14:35:55: 3612 uniformity Message-ID: 3612 poor uniformity, leaving a circular pattern. From vilanova at snf.stanford.edu Mon Nov 8 08:13:21 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Nov 2010 08:13:21 -0800 Subject: Problem svgcoat2 SNF 2010-11-07 14:35:55: 3612 uniformity Message-ID: 3612 Uniformity was bad because THE RESIST BOTTLE WAS EMPTY,Changed Bottle and cycled Test wafers, System Ok good to use. From mkerby at snf.stanford.edu Mon Nov 8 12:59:30 2010 From: mkerby at snf.stanford.edu (mkerby at snf.stanford.edu) Date: Mon, 8 Nov 2010 12:59:30 -0800 Subject: Problem svgcoat2 SNF 2010-11-08 12:59:30: fails to run - hot plate pins sticking up. Message-ID: reset the track sucessfully but three pins are projecting from the hot plate surface. the hot plate does not rise to the ready position. Could not get to run. From mkerby at snf.stanford.edu Mon Nov 8 13:07:40 2010 From: mkerby at snf.stanford.edu (mkerby at snf.stanford.edu) Date: Mon, 8 Nov 2010 13:07:40 -0800 Subject: Shutdown svgcoat2 SNF 2010-11-08 13:07:40: Will not run- hot plate pins protruding Message-ID: reset the track sucessfully but three pins are projecting from the hot plate surface. the hot plate does not rise to the ready position. Could not get to run. From vilanova at snf.stanford.edu Mon Nov 8 13:44:58 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Nov 2010 13:44:58 -0800 Subject: Problem svgcoat2 SNF 2010-11-08 12:59:30: fails to run - hot plate pins sticking up. Message-ID: reset the track and cycled 5 Wafers Hotplate works fine, pins are working fine , ok to use From vilanova at snf.stanford.edu Mon Nov 8 13:45:04 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Nov 2010 13:45:04 -0800 Subject: Shutdown svgcoat2 SNF 2010-11-08 13:07:40: Will not run- hot plate pins protruding Message-ID: reset the track and cycled 5 Wafers Hotplate works fine, pins are working fine , ok to use From chienyuc at snf.stanford.edu Mon Nov 8 20:59:03 2010 From: chienyuc at snf.stanford.edu (chienyuc at snf.stanford.edu) Date: Mon, 8 Nov 2010 20:59:03 -0800 Subject: Comment svgcoat2 SNF 2010-11-08 20:59:02: bubbles in 3612 tube Message-ID: Checked the resist bottle is still more than half full, but constantly get bubbles that alarms and causes non-uniformity coating. Will run more dummies to get rid of them in next run. From jparker at snf.stanford.edu Tue Nov 9 09:41:05 2010 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 9 Nov 2010 09:41:05 -0800 Subject: Problem svgcoat2 SNF 2010-11-09 09:41:04: bubbles follow-up Message-ID: Many visible (half dozen, not small) bubbles in disp1 tube right as tube exits bottle. This probably means there's a bad seal somewhere early in the line. I don't recommend using 3612 to avoid exascerbating the problem. From vilanova at snf.stanford.edu Tue Nov 9 14:40:26 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 9 Nov 2010 14:40:26 -0800 Subject: Problem svgcoat2 SNF 2010-11-09 09:41:04: bubbles follow-up Message-ID: Adjusted suck valve and purged line, Cycled test wafers Uniformity looks good there no bubbles in the line , ok to use. From vilanova at snf.stanford.edu Tue Nov 9 14:40:35 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 9 Nov 2010 14:40:35 -0800 Subject: Comment svgcoat2 SNF 2010-11-08 20:59:02: bubbles in 3612 tube Message-ID: Adjusted suck valve and purged line, Cycled test wafers Uniformity looks good there no bubbles in the line , ok to use. From jasonlin at snf.stanford.edu Wed Nov 10 12:44:20 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Wed, 10 Nov 2010 12:44:20 -0800 Subject: Problem svgcoat2 SNF 2010-11-10 12:44:20: EBR problem Message-ID: I used 2mm EBR but it sprayed EBR all over my wafer (program 7 1.0um 2mm EBR). From jasonlin at snf.stanford.edu Wed Nov 10 12:45:58 2010 From: jasonlin at snf.stanford.edu (jasonlin at snf.stanford.edu) Date: Wed, 10 Nov 2010 12:45:58 -0800 Subject: Problem svgcoat2 SNF 2010-11-10 12:45:58: 3612 circular pattern Message-ID: Oops! I wrote up the problem on svgcoat by accident. This problem is on track 2: There's a circular pattern using 3612 (non uniformity?). I wrote this as a problem but it was cleared with the reason that the resist bottle was empty (but no alarm). This time I made sure the resist bottle is not empty but the pattern is still there. Would appreciate help on this. Thank you! From latta at snf.stanford.edu Wed Nov 10 12:48:37 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Wed, 10 Nov 2010 12:48:37 -0800 Subject: Problem svgcoat2 SNF 2010-11-10 12:44:20: EBR problem Message-ID: for track1 From gsosa at snf.stanford.edu Thu Nov 11 07:06:32 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Nov 2010 07:06:32 -0800 Subject: Problem svgcoat2 SNF 2010-11-10 12:45:58: 3612 circular pattern Message-ID: Purged bubbles out of dispense line. Adjusted suckback From bchui at snf.stanford.edu Thu Nov 11 19:29:22 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 11 Nov 2010 19:29:22 -0800 Subject: Problem svgcoat2 SNF 2010-11-11 19:29:21: vapor prime chuck sticky Message-ID: When lifter tries to lift wafer up after vapor prime, wafer initially sticks then dislodges violently with a big clink. From wonukjo at snf.stanford.edu Sat Nov 13 10:36:34 2010 From: wonukjo at snf.stanford.edu (wonukjo at snf.stanford.edu) Date: Sat, 13 Nov 2010 10:36:34 -0800 Subject: Problem svgcoat2 SNF 2010-11-13 10:36:34: station not working Message-ID: after failing hot-plate baking it won't process any wafers. From vilanova at snf.stanford.edu Mon Nov 15 08:21:13 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 15 Nov 2010 08:21:13 -0800 Subject: Problem svgcoat2 SNF 2010-11-13 10:36:34: station not working Message-ID: Cyclked wafers cleaned dummies , hotplate working fine Couldnt repeat the user problem, ok to use. From xuanwu at snf.stanford.edu Fri Nov 19 00:35:48 2010 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Fri, 19 Nov 2010 00:35:48 -0800 Subject: Problem svgcoat2 SNF 2010-11-19 00:35:47: receiver didn't go down Message-ID: wafers got stuck on chiller, and no way to get receiver down (holding the tab and pressing start didn't work) From gsosa at snf.stanford.edu Fri Nov 19 08:49:02 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 19 Nov 2010 08:49:02 -0800 Subject: Problem svgcoat2 SNF 2010-11-19 00:35:47: receiver didn't go down Message-ID: Tested track operation. All seems to be working fine From dkozak at snf.stanford.edu Fri Nov 26 15:23:40 2010 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Fri, 26 Nov 2010 15:23:40 -0800 Subject: Problem svgcoat2 SNF 2010-11-26 15:23:39: no transfer from sender Message-ID: no transfer from sender -- multiple alarms. Tried to re-start the program, no results From gsosa at snf.stanford.edu Sat Nov 27 12:06:51 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Sat, 27 Nov 2010 12:06:51 -0800 Subject: Problem svgcoat2 SNF 2010-11-26 15:23:39: no transfer from sender Message-ID: Tested track operation . All appears to be functioning normally. Possibly, there was a internal drain full or system was in manual. From jtsai at snf.stanford.edu Sat Nov 27 13:20:13 2010 From: jtsai at snf.stanford.edu (jtsai at snf.stanford.edu) Date: Sat, 27 Nov 2010 13:20:13 -0800 Subject: Problem svgcoat2 SNF 2010-11-27 13:20:12: coater arm does not lift Message-ID: coater arm does not move to the wafer center position, so no PR is dispensed. From ajamo at snf.stanford.edu Sun Nov 28 01:06:34 2010 From: ajamo at snf.stanford.edu (ajamo at snf.stanford.edu) Date: Sun, 28 Nov 2010 01:06:34 -0800 Subject: Comment svgcoat2 SNF 2010-11-28 01:06:34: SPR220-3 seems okay Message-ID: previous user said the coater arm was not dispensing resist? Prog 4 with 4um SPR220-3 seems okay, resist is dispensing. Perhaps problems are recipe related From gsosa at snf.stanford.edu Mon Nov 29 10:04:50 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 29 Nov 2010 10:04:50 -0800 Subject: Problem svgcoat2 SNF 2010-11-27 13:20:12: coater arm does not lift Message-ID: Tested with several programs. Unable to repeat the problem. From srikantv at snf.stanford.edu Tue Nov 30 02:44:43 2010 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Tue, 30 Nov 2010 02:44:43 -0800 Subject: Problem svgcoat2 SNF 2010-11-30 02:44:42: wafer doesn't proceed along track Message-ID: From dkozak at snf.stanford.edu Tue Nov 30 03:28:43 2010 From: dkozak at snf.stanford.edu (dkozak at snf.stanford.edu) Date: Tue, 30 Nov 2010 03:28:43 -0800 Subject: Problem svgcoat2 SNF 2010-11-30 03:28:43: "upstream not ready" Message-ID: Same problem as several days ago -- previous user could not process wafers, error was "remove wafer from VP/oven", there was no wafer there. Attempts to clear did not succeed From karthikv at snf.stanford.edu Tue Nov 30 07:15:17 2010 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Tue, 30 Nov 2010 07:15:17 -0800 Subject: Problem svgcoat2 SNF 2010-11-30 07:15:16: wafer transfer problem Message-ID: same problem as previous users. However, coater and hpo work in manual mode From king at snf.stanford.edu Tue Nov 30 19:11:00 2010 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Tue, 30 Nov 2010 19:11:00 -0800 Subject: Problem svgcoat2 SNF 2010-11-30 19:11:00: leaving streaks Message-ID: