Problem svgcoat2 SNF 2010-11-01 17:36:12: loader bad

bchui at snf.stanford.edu bchui at snf.stanford.edu
Mon Nov 1 17:36:13 PDT 2010


keeps beeping, belt won't load any wafers in from the loading cassette (shows "RMV WAFER FROM PRIME" message even though there are no wafers in the prime station)




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