Comment svgcoat2 SNF 2010-11-02 08:29:43: 955 0.7um Thickness 11/2

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Nov 2 08:29:43 PDT 2010


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(5 points): 6882  Angstroms, Std Dev. 12 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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