Shutdown svgcoat2 SNF 2010-11-03 07:26:32: Maintenance work 11/3

gsosa at gsosa at
Wed Nov 3 11:15:37 PDT 2010

Wafer lifter on VP module getting stuck sometimes. Replaced the leadscrew assembly/ including drive motor. Tested the lifters under normal operartion- OK. Tested the lifter reset routine with track reset function and power down/up sequence- Lifter function OK. checked wafer centering- OK.

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