Problem svgcoat2 SNF 2010-11-01 17:36:12: loader bad

gsosa at gsosa at
Wed Nov 3 11:16:04 PDT 2010

Wafer lifter on VP module getting stuck sometimes. Replaced the leadscrew assembly/ including drive motor. Tested the lifters under normal operartion- OK. Tested the lifter reset routine with track reset function and power down/up sequence- Lifter function OK. checked wafer centering- OK.

More information about the svgcoat2-pcs mailing list