Problem svgcoat2 SNF 2010-11-02 09:58:59: EBR centering is out

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Nov 3 11:16:20 PDT 2010


Wafer lifter on VP module getting stuck sometimes. Replaced the leadscrew assembly/ including drive motor. Tested the lifters under normal operartion- OK. Tested the lifter reset routine with track reset function and power down/up sequence- Lifter function OK. checked wafer centering- OK.




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