Problem svgcoat2 SNF 2010-11-07 14:35:55: 3612 uniformity

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Nov 8 08:13:21 PST 2010


3612 Uniformity was bad because THE RESIST BOTTLE WAS 
EMPTY,Changed Bottle and cycled Test wafers, System Ok 
good to use. 




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