Comment svgcoat2 SNF 2010-11-08 20:59:02: bubbles in 3612 tube

chienyuc at snf.stanford.edu chienyuc at snf.stanford.edu
Mon Nov 8 20:59:03 PST 2010


Checked the resist bottle is still more than half full, but constantly get bubbles that alarms and causes non-uniformity coating.  Will run more dummies to get rid of them in next run.




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