Problem svgcoat2 SNF 2010-11-09 09:41:04: bubbles follow-up

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Nov 9 14:40:26 PST 2010


Adjusted suck valve and purged line, Cycled test wafers 
Uniformity looks good there no bubbles in the line , ok to use. 




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