Problem svgcoat2 SNF 2010-11-11 19:29:21: vapor prime chuck sticky

bchui at snf.stanford.edu bchui at snf.stanford.edu
Thu Nov 11 19:29:22 PST 2010


When lifter tries to lift wafer up after vapor prime, wafer initially sticks then dislodges violently with a big clink.




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