Comment svgcoat2 SNF 2010-11-28 01:06:34: SPR220-3 seems okay

ajamo at snf.stanford.edu ajamo at snf.stanford.edu
Sun Nov 28 01:06:34 PST 2010


previous user said the coater arm was not dispensing resist?   Prog 4 with 4um SPR220-3 seems okay,  resist is dispensing.  Perhaps problems are recipe related




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