Problem svgcoat2 SNF 2010-11-30 03:28:43: "upstream not ready"

dkozak at snf.stanford.edu dkozak at snf.stanford.edu
Tue Nov 30 03:28:43 PST 2010


Same problem as several days ago --
previous user could not process wafers, error was "remove wafer from VP/oven", there was no wafer there.  
Attempts to clear did not succeed




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