Problem svgcoat2 SNF 2010-10-02 00:21:12: EBR not working properly

karthikv at snf.stanford.edu karthikv at snf.stanford.edu
Sat Oct 2 00:21:13 PDT 2010


There is residual resist remaining post EBR and some of the resist near the EBR region is getting smudged. Noticed this on 5 wafers with Prog #8 (3612)




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