Problem svgcoat2 SNF 2010-10-02 15:41:02: spr3612 1um nonuniform coating

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Oct 5 15:08:55 PDT 2010


Replaced resist bottle and purged 3612 dispense line. Also slowed down pump refill stroke speed. Checked coatings with test wafers. looks OK.




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