Problem svgcoat2 SNF 2010-10-03 17:20:15: Bubble in 3612 line

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Oct 5 15:09:04 PDT 2010


Replaced resist bottle and purged 3612 dispense line. Also slowed down pump refill stroke speed. Checked coatings with test wafers. looks OK.




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