Comment svgcoat2 SNF 2010-10-05 15:13:39: 220-3 process down 10/5

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Oct 5 15:13:39 PDT 2010


Still working on 220-3 processes for 3 and 4 micron thicknesses. Cannot control the suckback which creates a drip at the nozzle tip. The drip eventually falls which can drop onto wafer and cause poor spin. We are going to replace the resist transition tube from the dispense arm to nozzle tip and re-test. We will do this work tomorrow morning.




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