Problem svgcoat2 SNF 2010-10-04 23:17:45: prog4 3um needs more suckback

gsosa at gsosa at
Wed Oct 6 15:20:38 PDT 2010

Worked on 220-3 resist dripping. Replaced the dispense hose at dispense arm transition to the dispense tip. Also replaced the Cybor pump. Purged and checked for leaks- OK. Checked and adjusted suckback. Checked 3. Checked and updated dispense arm timing to sync with pump dispense. Checked 3 and 4 micron thickness- OK. Do not forget to clean the resist nozzle tips with a Q-tip and Acetone and running a couple of dummy wafers before processing your real wafers
Thickness Results:
  Target- 3.0um  Mean- 30086 A,  Std Dev.- 54 A
  Target- 4.0um  Mean- 40649 A, Std Dev- 24 A 

More information about the svgcoat2-pcs mailing list