Comment svgcoat2 SNF 2010-10-05 15:13:39: 220-3 process down 10/5

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Oct 8 06:55:36 PDT 2010


Worked on 220-3 resist dripping. Replaced the dispense hose at dispense arm transition to the dispense tip. Also replaced the Cybor pump. Purged and checked for leaks- OK. Checked and adjusted suckback. Checked 3. Checked and updated dispense arm timing to sync with pump dispense. Checked 3 and 4 micron thickness- OK. Do not forget to clean the resist nozzle tips with a Q-tip and Acetone and running a couple of dummy wafers before processing your real wafers
Thickness Results:
  
  Target- 3.0um  Mean- 30086 A,  Std Dev.- 54 A
  Target- 4.0um  Mean- 40649 A, Std Dev- 24 A 




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