Problem svgcoat2 SNF 2010-10-08 08:57:02: No cooling, swirls in the PR, track 2

king at snf.stanford.edu king at snf.stanford.edu
Fri Oct 8 08:57:02 PDT 2010


Using the HMDS with pgm 7 left some slight swirl pattern in the PR.  Could it be caused by wafers not cooling?  There is no active cooling after HMDS and wafers go onto the chuck anywhere from warm to very warm.   Why can't we have active cooling as designed?  Just asking, thanks.




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