Problem svgcoat2 SNF 2010-10-12 17:45:09:

merwan at snf.stanford.edu merwan at snf.stanford.edu
Tue Oct 12 17:45:09 PDT 2010


I ran 1.6um recipe on  3 dummies followed by 3 out of the box bare silicon wafers. I used used the recipe with vapor prime. I got poor spin on the 3 wafers. 




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