Problem svgcoat2 SNF 2010-10-12 17:45:09:

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Oct 13 09:52:50 PDT 2010


HMDS plate contaminated with resist. Cleaned hotplate surface. tested 3612 1.6 um with VP program. Process program executed OK. Noticed too much suckback which created an air pocket at the dispense tip. Adjusted and tested suckback- OK. Noticed that resist dispense started slightly before the D/A was all the way down. Checked and adjusted arm sensor position on actuator air cylinder. Dispense timing looks good now. Also tested 955 resist 1.0 um program. Resist coating looks good.  3612 1.6 um and 955 1.0 um thickness tests OK. 




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