Problem svgcoat2 SNF 2010-10-16 10:47:15: Wafer stuck

karthikv at snf.stanford.edu karthikv at snf.stanford.edu
Sat Oct 16 10:47:16 PDT 2010

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Dummy wafer stuck in the resist dispense station. Vacuum is still on. Unable to remove wafer.

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Next message: Problem svgcoat2 SNF 2010-10-16 10:47:15: Wafer stuck
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