Problem svgcoat2 SNF 2010-10-16 15:34:42: Input cassette sensor doesn't sense wafers

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Oct 18 08:06:53 PDT 2010


Someone removed Wafer, and reset the system, checked and cycled wafers, everything looks normal , maybe someone had the program 
Under manual mode or the small carboy was full , Cycled wafers and
 cleaned  dummies. Ok to use. 




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