Problem svgcoat2 SNF 2010-10-21 01:07:48:

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Oct 21 08:58:47 PDT 2010


Replaced Dirty Catch cup and cleaned spindle chuck and hotplate
Changed Resist bottle ( bottle was almos empty) Purged line
cleaned dummy wafers, cycled wafers , Uniformity Looks Good
Ok to use. 




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