Problem svgcoat2 SNF 2010-10-21 01:07:48:

vilanova at vilanova at
Thu Oct 21 08:58:47 PDT 2010

Replaced Dirty Catch cup and cleaned spindle chuck and hotplate
Changed Resist bottle ( bottle was almos empty) Purged line
cleaned dummy wafers, cycled wafers , Uniformity Looks Good
Ok to use. 

More information about the svgcoat2-pcs mailing list