Problem svgcoat2 SNF 2010-10-24 21:30:59: transfer problem

vilanova at vilanova at
Mon Oct 25 08:56:40 PDT 2010

The HMDS track Rail Got stuck On the bottom due to excess amount of
resist on the hotplate, Cleaned plate and also replaced Exhaust tubing
Cycled Wafers ( All Programs ) cleaned dummy wafers, Ok to use. 

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