Problem svgcoat2 SNF 2010-10-28 00:47:09: wafer does not move when start

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Oct 28 15:11:00 PDT 2010


Lifters on VP module needed reseting. Cleaned and lubed the lifter lead screw assembly. Did lifter calibration. Cycled many wafers through the track- All OK




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