Shutdown svgcoat2 SNF 2010-10-31 17:08:38: Transfer problem

runen at snf.stanford.edu runen at snf.stanford.edu
Sun Oct 31 17:08:39 PDT 2010


Unable to transfer wafer from sender casette to VP. It appears that the VP wafer holders got stuck, similar to the descriptions from October 24th and 28th.
Error message at VP station: "Wafer carrier at offld?"
It appers that the small wafer carrier is stuck at the bottom of the VP hotplate (looks like it tries to lift, but fails)




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