From mahnaz at snf.stanford.edu Wed Sep 1 10:45:51 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 1 Sep 2010 10:45:51 -0700 Subject: Shutdown svgcoat2 SNF 2010-09-01 10:45:51: wafer simply stuck Message-ID: 3rd wafer running 220-3 prog.#4 got stuck on the chuck spinning. Not able to stop it or do anything. From vilanova at snf.stanford.edu Wed Sep 1 11:38:13 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 1 Sep 2010 11:38:13 -0700 Subject: Shutdown svgcoat2 SNF 2010-09-01 10:45:51: wafer simply stuck Message-ID: adjusted arm air valve, tested ok to use. From mahnaz at snf.stanford.edu Wed Sep 1 15:03:24 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 1 Sep 2010 15:03:24 -0700 Subject: Problem svgcoat2 SNF 2010-09-01 15:03:24: 220-3 nonuniform/rough EBR Message-ID: thickness is in within the spec 40420A From haemmerl at snf.stanford.edu Thu Sep 2 13:42:51 2010 From: haemmerl at snf.stanford.edu (haemmerl at snf.stanford.edu) Date: Thu, 2 Sep 2010 13:42:51 -0700 Subject: Problem svgcoat2 SNF 2010-09-02 13:42:50: 1.6um 2mm EBR Message-ID: Edges are not clean. From mahnaz at snf.stanford.edu Fri Sep 3 10:52:54 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 3 Sep 2010 10:52:54 -0700 Subject: Comment svgcoat2 SNF 2010-09-03 10:52:53: 220-3 4 um Message-ID: Looks good, EBR looks good, back of wf clean and non uniformity is at minimal. Need at least to run 3 dummies before commiting your real wafers. thicknes is at 40400A From bchui at snf.stanford.edu Mon Sep 6 15:23:29 2010 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 6 Sep 2010 15:23:29 -0700 Subject: Problem svgcoat2 SNF 2010-09-06 15:23:28: Low on 3612 resist Message-ID: starting to alarm From vilanova at snf.stanford.edu Tue Sep 7 07:44:53 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 7 Sep 2010 07:44:53 -0700 Subject: Problem svgcoat2 SNF 2010-09-06 15:23:28: Low on 3612 resist Message-ID: SOmeone Replaced the Resist bottle , Ok to use now. From lindaw at snf.stanford.edu Tue Sep 7 13:08:52 2010 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 7 Sep 2010 13:08:52 -0700 Subject: Problem svgcoat2 SNF 2010-09-07 13:08:52: dispense head drops resist on wafer at end of spin Message-ID: when the dispense head lifts up at the end of the spin, it jerks, and a huge drop of resist land on the wafer. 4 wafers in a row. 3612 program 2 wvp, no ebr and program 2 wo vp no ebr. From kyunglok at snf.stanford.edu Tue Sep 7 22:00:31 2010 From: kyunglok at snf.stanford.edu (kyunglok at snf.stanford.edu) Date: Tue, 7 Sep 2010 22:00:31 -0700 Subject: Problem svgcoat2 SNF 2010-09-07 22:00:30: 3612 resist alarm and dirty edge Message-ID: I have used 1.6um wo VP, 5mm EBR. When it start coating, 3612 alarm occurred. And the edge of wafer is not clean after EBR. From gsosa at snf.stanford.edu Thu Sep 9 09:54:59 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 9 Sep 2010 09:54:59 -0700 Subject: Shutdown svgcoat2 SNF 2010-09-09 09:54:58: Maint working on track Message-ID: Working on Dispense arm problem. From gsosa at snf.stanford.edu Thu Sep 9 13:46:21 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 9 Sep 2010 13:46:21 -0700 Subject: Shutdown svgcoat2 SNF 2010-09-09 09:54:58: Maint working on track Message-ID: Replaced air cylinder for dispense arm pivot up/down. Checked and adjusted speed controllers for smooth movement. Checked and adjusted pump stroke speed and suckback. Tested operation. All OK. From gsosa at snf.stanford.edu Thu Sep 9 13:46:31 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 9 Sep 2010 13:46:31 -0700 Subject: Problem svgcoat2 SNF 2010-09-07 13:08:52: dispense head drops resist on wafer at end of spin Message-ID: Replaced air cylinder for dispense arm pivot up/down. Checked and adjusted speed controllers for smooth movement. Checked and adjusted pump stroke speed and suckback. Tested operation. All OK. From vilanova at snf.stanford.edu Fri Sep 10 08:54:01 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 10 Sep 2010 08:54:01 -0700 Subject: Problem svgcoat2 SNF 2010-09-07 22:00:30: 3612 resist alarm and dirty edge Message-ID: We've Replaced Defective Arm Dispense air cylinder, Cleaned hotplates catch cup ,chuck and belts , Purged Line,Adjusted dispense Hose adjusted Pump Suckback ,Cleaned secondary contaiment HOse ,exhaust tubing ,Cycled Wafers , Uniformity Looks Good Wafer Edges are clean , Back of wafers clean and NO more Anoying Alarms. From vilanova at snf.stanford.edu Fri Sep 10 08:54:11 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 10 Sep 2010 08:54:11 -0700 Subject: Problem svgcoat2 SNF 2010-08-23 18:11:24: Streaks Message-ID: We've Replaced Defective Arm Dispense air cylinder, Cleaned hotplates catch cup ,chuck and belts , Purged Line,Adjusted dispense Hose adjusted Pump Suckback ,Cleaned secondary contaiment HOse ,exhaust tubing ,Cycled Wafers , Uniformity Looks Good Wafer Edges are clean , Back of wafers clean and NO more Anoying Alarms. From vilanova at snf.stanford.edu Fri Sep 10 08:54:26 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 10 Sep 2010 08:54:26 -0700 Subject: Problem svgcoat2 SNF 2010-09-02 13:42:50: 1.6um 2mm EBR Message-ID: We've Replaced Defective Arm Dispense air cylinder, Cleaned hotplates catch cup ,chuck and belts , Purged Line,Adjusted dispense Hose adjusted Pump Suckback ,Cleaned secondary contaiment HOse ,exhaust tubing ,Cycled Wafers , Uniformity Looks Good Wafer Edges are clean , Back of wafers clean and NO more Anoying Alarms. From mahnaz at snf.stanford.edu Wed Sep 15 10:12:50 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 15 Sep 2010 10:12:50 -0700 Subject: Shutdown svgcoat2 SNF 2010-09-15 10:12:50: fitting issues with line Message-ID: From vilanova at snf.stanford.edu Wed Sep 15 11:38:52 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 15 Sep 2010 11:38:52 -0700 Subject: Shutdown svgcoat2 SNF 2010-09-15 10:12:50: fitting issues with line Message-ID: Replaced Fittings and adjusted sensor location, ok to use. From mahnaz at snf.stanford.edu Wed Sep 15 11:40:24 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 15 Sep 2010 11:40:24 -0700 Subject: Comment svgcoat2 SNF 2010-09-15 11:40:23: 3612 looks good Message-ID: I ran 1 um and 1.6 um and came out good. From mahnaz at snf.stanford.edu Wed Sep 15 12:00:57 2010 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 15 Sep 2010 12:00:57 -0700 Subject: Problem svgcoat2 SNF 2010-09-15 12:00:56: pump and sensor issues Message-ID: We worked on the track most of morning. Suck back is not controled and the sensor on resist line beeps. all the fittings has been changed and the line has been purged with acetone. Mario will call Pico track to get the senor ordered and check on the status of the other svg pump that has gone out for rebuild. if the pump needs to be changed with new pump then it has to wait for the first pump to come back. The rsult on the 1 and 1.6 um 3612 is very inconsistent. From carterlin at snf.stanford.edu Wed Sep 15 23:11:44 2010 From: carterlin at snf.stanford.edu (carterlin at snf.stanford.edu) Date: Wed, 15 Sep 2010 23:11:44 -0700 Subject: Problem svgcoat2 SNF 2010-09-15 23:11:44: track stop running in middle of a cassette Message-ID: From vilanova at snf.stanford.edu Thu Sep 16 08:26:31 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 16 Sep 2010 08:26:31 -0700 Subject: Problem svgcoat2 SNF 2010-09-15 23:11:44: track stop running in middle of a cassette Message-ID: the small secondary container ( resist waste ) Under the system was full , when the Small container ( carboys ) gets full triggers the sensor therefore wafers cant continue running until the carboys gets empty ( Instructions hoyw to empty that particular carboy are On the plastic right hand side WIndow Panel , Emptied Carboy, cycled wafers, ok to use. From gsosa at snf.stanford.edu Thu Sep 16 09:01:41 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 16 Sep 2010 09:01:41 -0700 Subject: Comment svgcoat2 SNF 2010-09-16 09:01:40: 955 0.7 thickness test -9/16 Message-ID: Checked the 0.7 micron resist program for SPR 955-.7 photoresist. Target thickness = 0.7 microns. Mean thickness(5 points): 6927 Angstroms, Std Dev. 8 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean. From xzhuan1 at snf.stanford.edu Thu Sep 16 11:02:34 2010 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Thu, 16 Sep 2010 11:02:34 -0700 Subject: Problem svgcoat2 SNF 2010-09-16 11:02:34: resist dripping on wafer during ebr Message-ID: on 1um 3612 recipe From filip at snf.stanford.edu Thu Sep 16 23:27:22 2010 From: filip at snf.stanford.edu (filip at snf.stanford.edu) Date: Thu, 16 Sep 2010 23:27:22 -0700 Subject: Problem svgcoat2 SNF 2010-09-16 23:27:22: 3612 drop on EVERY wafer Message-ID: From xuanwu at snf.stanford.edu Fri Sep 17 01:31:33 2010 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Fri, 17 Sep 2010 01:31:33 -0700 Subject: Problem svgcoat2 SNF 2010-09-17 01:31:33: 955 0.7 wo/VP 2mm EBR Message-ID: Resist uniformity not very good; streaking on some wafers; small dots of nonuniform coverage on some wafers; some wafers were fine From gsosa at snf.stanford.edu Fri Sep 17 07:50:12 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 17 Sep 2010 07:50:12 -0700 Subject: Shutdown svgcoat2 SNF 2010-09-17 07:50:11: Working on 3612 Message-ID: Working on 3612 dripping problem, From gsosa at snf.stanford.edu Fri Sep 17 16:38:37 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 17 Sep 2010 16:38:37 -0700 Subject: Shutdown svgcoat2 SNF 2010-09-17 07:50:11: Working on 3612 Message-ID: Checked and replaced transition dispense tube from dispense arm to dispense head- still bubbles in dispense tube. Noyiced large bubbles from dip tube out of resist bottle to pump input. Replaced dip tube and ran a continuous tube from bottle to pump input with no transition fittings. Still getting bubbles out of resist bottle. Replaced resist bottle with a new lot # of 3612. Now no more large bubbles from resist bottle. Adjusted pump stoke travel, stroke speed and suckback. Dispense shows improvement but still may develop a drip at the dispense nozzle. We are still planning on replacing the resist pump. Please clean the nozzle tip and run 2 or 3 dummy wafers prior to commiting your wafers. Purged pump 3 and checked 955 0.7 resist. Spin quality looks good. 3 and 4 micron also OK. 3612 Thickness results: Target 1.0um- Mean : 10234 A, Std Dev: 20 A Target 1.6um- Mean : 17029 A, Std Dev: 18A From gsosa at snf.stanford.edu Fri Sep 17 16:39:32 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 17 Sep 2010 16:39:32 -0700 Subject: Comment svgcoat2 SNF 2010-09-17 16:39:30: 3612 Status 9/17 Message-ID: Checked and replaced transition dispense tube from dispense arm to dispense head- still bubbles in dispense tube. Noyiced large bubbles from dip tube out of resist bottle to pump input. Replaced dip tube and ran a continuous tube from bottle to pump input with no transition fittings. Still getting bubbles out of resist bottle. Replaced resist bottle with a new lot # of 3612. Now no more large bubbles from resist bottle. Adjusted pump stoke travel, stroke speed and suckback. Dispense shows improvement but still may develop a drip at the dispense nozzle. We are still planning on replacing the resist pump. Please clean the nozzle tip and run 2 or 3 dummy wafers prior to commiting your wafers. Purged pump 3 and checked 955 0.7 resist. Spin quality looks good. 3 and 4 micron also OK. 3612 Thickness results: Target 1.0um- Mean : 10234 A, Std Dev: 20 A Target 1.6um- Mean : 17029 A, Std Dev: 18A From gsosa at snf.stanford.edu Fri Sep 17 16:40:09 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 17 Sep 2010 16:40:09 -0700 Subject: Problem svgcoat2 SNF 2010-09-17 01:31:33: 955 0.7 wo/VP 2mm EBR Message-ID: Purged pump 3 and checked with bare silicon wafers. Spin quality looks good. From vilanova at snf.stanford.edu Tue Sep 21 14:05:08 2010 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Sep 2010 14:05:08 -0700 Subject: Shutdown svgcoat2 SNF 2010-09-21 14:05:07: Under maintenance...... Message-ID: From gsosa at snf.stanford.edu Tue Sep 21 15:11:17 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 21 Sep 2010 15:11:17 -0700 Subject: Shutdown svgcoat2 SNF 2010-09-21 14:05:07: Under maintenance...... Message-ID: Replaced resist pump for 3612 resist with rebuilt pump. Tested with acetone and checked for leaks- OK. Purged in 3612 resist. Adjusted pump stoke length and speed for smooth operation. Checked and adjusted suckback volume and speed. Tested 1.0 and 1.6 micron thickness-OK. Top and bottom EBR look good. Thickness results Target: 1.0um Mean: 10277A Std Dev: 14A Target: 1.6um Mean: 17020A Std Dev: 15A From gsosa at snf.stanford.edu Tue Sep 21 15:11:36 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 21 Sep 2010 15:11:36 -0700 Subject: Problem svgcoat2 SNF 2010-09-16 23:27:22: 3612 drop on EVERY wafer Message-ID: Replaced resist pump for 3612 resist with rebuilt pump. Tested with acetone and checked for leaks- OK. Purged in 3612 resist. Adjusted pump stoke length and speed for smooth operation. Checked and adjusted suckback volume and speed. Tested 1.0 and 1.6 micron thickness-OK. Top and bottom EBR look good. Thickness results Target: 1.0um Mean: 10277A Std Dev: 14A Target: 1.6um Mean: 17020A Std Dev: 15A From gsosa at snf.stanford.edu Tue Sep 21 15:11:46 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 21 Sep 2010 15:11:46 -0700 Subject: Problem svgcoat2 SNF 2010-09-16 11:02:34: resist dripping on wafer during ebr Message-ID: Replaced resist pump for 3612 resist with rebuilt pump. Tested with acetone and checked for leaks- OK. Purged in 3612 resist. Adjusted pump stoke length and speed for smooth operation. Checked and adjusted suckback volume and speed. Tested 1.0 and 1.6 micron thickness-OK. Top and bottom EBR look good. Thickness results Target: 1.0um Mean: 10277A Std Dev: 14A Target: 1.6um Mean: 17020A Std Dev: 15A From gsosa at snf.stanford.edu Tue Sep 21 15:12:10 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 21 Sep 2010 15:12:10 -0700 Subject: Problem svgcoat2 SNF 2010-09-15 12:00:56: pump and sensor issues Message-ID: Replaced resist pump for 3612 resist with rebuilt pump. Tested with acetone and checked for leaks- OK. Purged in 3612 resist. Adjusted pump stoke length and speed for smooth operation. Checked and adjusted suckback volume and speed. Tested 1.0 and 1.6 micron thickness-OK. Top and bottom EBR look good. Thickness results Target: 1.0um Mean: 10277A Std Dev: 14A Target: 1.6um Mean: 17020A Std Dev: 15A From gsosa at snf.stanford.edu Tue Sep 21 15:12:42 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 21 Sep 2010 15:12:42 -0700 Subject: Comment svgcoat2 SNF 2010-09-21 15:12:41: 3612 Status 9/21 Message-ID: Replaced resist pump for 3612 resist with rebuilt pump. Tested with acetone and checked for leaks- OK. Purged in 3612 resist. Adjusted pump stoke length and speed for smooth operation. Checked and adjusted suckback volume and speed. Tested 1.0 and 1.6 micron thickness-OK. Top and bottom EBR look good. Thickness results Target: 1.0um Mean: 10277A Std Dev: 14A Target: 1.6um Mean: 17020A Std Dev: 15A From jwpchen at snf.stanford.edu Tue Sep 28 21:12:31 2010 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Tue, 28 Sep 2010 21:12:31 -0700 Subject: Comment svgcoat2 SNF 2010-09-28 21:12:30: oven belts sometimes drag wafer sideways Message-ID: for 2 out of 13 wafers, oven belts dragged wafer sideways which result in a hotplate vacuum alarm. doesn't happen all the time so be advised to watch closely when track is running