Shutdown svgcoat2 SNF 2010-09-01 10:45:51: wafer simply stuck

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Wed Sep 1 10:45:51 PDT 2010


3rd wafer running 220-3 prog.#4 got stuck on the chuck spinning.
Not able to stop it or do anything.




More information about the svgcoat2-pcs mailing list