Shutdown svgcoat2 SNF 2010-09-01 10:45:51: wafer simply stuck
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Wed Sep 1 11:38:13 PDT 2010
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Shutdown svgcoat2 SNF 2010-09-01 10:45:51: wafer simply stuck
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Problem svgcoat2 SNF 2010-09-01 15:03:24: 220-3 nonuniform/rough EBR
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adjusted arm air valve, tested ok to use.
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Shutdown svgcoat2 SNF 2010-09-01 10:45:51: wafer simply stuck
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Problem svgcoat2 SNF 2010-09-01 15:03:24: 220-3 nonuniform/rough EBR
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