Problem svgcoat2 SNF 2010-09-01 15:03:24: 220-3 nonuniform/rough EBR
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Wed Sep 1 15:03:24 PDT 2010
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Shutdown svgcoat2 SNF 2010-09-01 10:45:51: wafer simply stuck
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Problem svgcoat2 SNF 2010-09-02 13:42:50: 1.6um 2mm EBR
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thickness is in within the spec 40420A
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Shutdown svgcoat2 SNF 2010-09-01 10:45:51: wafer simply stuck
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Problem svgcoat2 SNF 2010-09-02 13:42:50: 1.6um 2mm EBR
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