Problem svgcoat2 SNF 2010-09-07 13:08:52: dispense head drops resist on wafer at end of spin

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Tue Sep 7 13:08:52 PDT 2010


when the dispense head lifts up at the end of the spin, it jerks, and a huge drop of resist land on the wafer.  4 wafers in a row. 3612 program 2 wvp, no ebr and program 2 wo vp no ebr. 




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