Problem svgcoat2 SNF 2010-09-07 22:00:30: 3612 resist alarm and dirty edge

kyunglok at snf.stanford.edu kyunglok at snf.stanford.edu
Tue Sep 7 22:00:31 PDT 2010


I have used 1.6um wo VP, 5mm EBR. When it start coating, 3612 alarm occurred. And the edge of wafer is not clean after EBR.




More information about the svgcoat2-pcs mailing list