Problem svgcoat2 SNF 2010-09-07 22:00:30: 3612 resist alarm and dirty edge

kyunglok at kyunglok at
Tue Sep 7 22:00:31 PDT 2010

I have used 1.6um wo VP, 5mm EBR. When it start coating, 3612 alarm occurred. And the edge of wafer is not clean after EBR.

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