Problem svgcoat2 SNF 2010-09-07 13:08:52: dispense head drops resist on wafer at end of spin

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Sep 9 13:46:31 PDT 2010


Replaced air cylinder for dispense arm pivot up/down. Checked and adjusted speed controllers for smooth movement. Checked and adjusted pump stroke speed and suckback. Tested operation. All OK. 




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