Problem svgcoat2 SNF 2010-09-07 22:00:30: 3612 resist alarm and dirty edge

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Sep 10 08:54:01 PDT 2010


We've Replaced Defective Arm Dispense air cylinder, Cleaned 
hotplates catch cup ,chuck and belts , Purged Line,Adjusted dispense Hose adjusted Pump Suckback ,Cleaned secondary contaiment
 HOse ,exhaust  tubing ,Cycled Wafers , Uniformity  Looks Good
Wafer Edges are clean , Back of wafers clean and NO more Anoying 
Alarms.




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