Problem svgcoat2 SNF 2010-09-07 22:00:30: 3612 resist alarm and dirty edge
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Fri Sep 10 08:54:01 PDT 2010
We've Replaced Defective Arm Dispense air cylinder, Cleaned
hotplates catch cup ,chuck and belts , Purged Line,Adjusted dispense Hose adjusted Pump Suckback ,Cleaned secondary contaiment
HOse ,exhaust tubing ,Cycled Wafers , Uniformity Looks Good
Wafer Edges are clean , Back of wafers clean and NO more Anoying
Alarms.
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