Problem svgcoat2 SNF 2010-08-23 18:11:24: Streaks

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri Sep 10 08:54:11 PDT 2010

Previous message: Shutdown svgcoat2 SNF 2010-09-09 09:54:58: Maint working on track
Next message: Shutdown svgcoat2 SNF 2010-09-15 10:12:50: fitting issues with line
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

We've Replaced Defective Arm Dispense air cylinder, Cleaned 
hotplates catch cup ,chuck and belts , Purged Line,Adjusted dispense Hose adjusted Pump Suckback ,Cleaned secondary contaiment
 HOse ,exhaust  tubing ,Cycled Wafers , Uniformity  Looks Good
Wafer Edges are clean , Back of wafers clean and NO more Anoying 
Alarms.

Previous message: Shutdown svgcoat2 SNF 2010-09-09 09:54:58: Maint working on track
Next message: Shutdown svgcoat2 SNF 2010-09-15 10:12:50: fitting issues with line
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the svgcoat2-pcs mailing list