Problem svgcoat2 SNF 2010-09-15 12:00:56: pump and sensor issues

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Wed Sep 15 12:00:57 PDT 2010


We worked on the track most of morning.
Suck back is not controled and the sensor on resist line beeps.
all the fittings has been changed and  the line has been purged with acetone.
Mario will call Pico track to get the senor ordered and check on the
 status of the other svg pump that has gone out for rebuild.
if the pump needs to be changed with new pump then it has to wait for the first  pump to come back.
The rsult on the 1 and 1.6 um 3612 is very inconsistent.




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