Comment svgcoat2 SNF 2010-09-16 09:01:40: 955 0.7 thickness test -9/16

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Thu Sep 16 09:01:41 PDT 2010


Checked the 0.7 micron resist program for SPR 955-.7 photoresist.  Target thickness = 0.7 microns. Mean thickness(5 points): 6927  Angstroms, Std Dev. 8 Angstroms. Spin quality looked good. EBR looked good and backs of wafers looked clean.




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