Problem svgcoat2 SNF 2010-09-17 01:31:33: 955 0.7 wo/VP 2mm EBR

xuanwu at snf.stanford.edu xuanwu at snf.stanford.edu
Fri Sep 17 01:31:33 PDT 2010


Resist uniformity not very good; streaking on some wafers; small dots of nonuniform coverage on some wafers; some wafers were fine




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