Problem svgcoat2 SNF 2010-09-17 01:31:33: 955 0.7 wo/VP 2mm EBR

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri Sep 17 16:40:09 PDT 2010


Purged pump 3 and checked with bare silicon wafers. Spin quality looks good.




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