Comment svgcoat2 SNF 2010-09-28 21:12:30: oven belts sometimes drag wafer sideways

jwpchen at snf.stanford.edu jwpchen at snf.stanford.edu
Tue Sep 28 21:12:31 PDT 2010


for 2 out of 13 wafers, oven belts dragged wafer sideways which result in a hotplate vacuum alarm. doesn't happen all the time so be advised to watch closely when track is running




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