Comment svgcoat2 SNF 2011-04-14 16:32:10: bad coverage

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Thu Apr 14 16:32:11 PDT 2011


On 4 out of 6 of my wafers, the center of the wafer has a weird starburst pattern coming off of it- 2/3 of the wafer looks good and 1/3 is messed up.




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