Problem svgcoat2 SNF 2011-04-14 19:32:56: occasional void in middle of wafer

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Thu Apr 14 19:32:56 PDT 2011


Occasionally getting a crescent-shaped void in the middle of some wafers using 3612 resist.  I have seen this a few times recently using both 1um and 1.6um.  




More information about the svgcoat2-pcs mailing list