Problem svgcoat2 SNF 2011-04-14 19:32:56: occasional void in middle of wafer

grahamab at grahamab at
Thu Apr 14 19:32:56 PDT 2011

Occasionally getting a crescent-shaped void in the middle of some wafers using 3612 resist.  I have seen this a few times recently using both 1um and 1.6um.  

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