Problem svgcoat2 SNF 2011-04-15 00:14:56: PR coverage problem

cfchiang at snf.stanford.edu cfchiang at snf.stanford.edu
Fri Apr 15 00:14:58 PDT 2011


Ran 3612 1.6um no top EBR. The track tended to skip the center portion of the wafer and left it uncoated. 3 out pf 7 had this problem. 




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