Problem svgcoat2 SNF 2011-04-15 00:14:56: PR coverage problem

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Apr 18 11:26:44 PDT 2011


Cleaned Up Vapor prime Station , Changed and purged 3612 Resist 
Bottle ( Found it very low earlier today ) I've ran several wafers
and Uniformity Looks good on my wafers, Also found the 
Small carboys  filled to the top , I cycled many wafers Under recipe 1.0um and 1.6um they look good , ready to use. 




More information about the svgcoat2-pcs mailing list