Problem svgcoat2 SNF 2011-04-18 18:17:59: 1um 3612 leaving an open spot in the middle of the wafer

grahamab at snf.stanford.edu grahamab at snf.stanford.edu
Mon Apr 18 18:18:00 PDT 2011


for the 6th time in 6 litho steps, I have to rework wafers because of this problem.  this has happened using 1um and 1.6um both.  wafers are loaded identically yet some still have this problem.  happens even with blank, brand new silicon wafers.  




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