Problem svgcoat2 SNF 2011-04-18 18:17:59: 1um 3612 leaving an open spot in the middle of the wafer

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue Apr 19 11:19:36 PDT 2011


Observed dispensing and noticed that sometimes the dispense would end slightly before the arm traveled to the center of the wafer. Slowed down the pump stroke a bit and increased the stroke length  Processed 12 clean silicon wafers with the standard 1.0 micron process. Coatings look very good. 




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