Problem svgcoat2 SNF 2011-04-24 16:16:24: the track stopped working in the middle

hongyuc at snf.stanford.edu hongyuc at snf.stanford.edu
Sun Apr 24 16:16:25 PDT 2011


i wa running 12 wafers. The truck  stopped transferring wafers. One wafers was baked for over 15 minutes,,,,no error message showed.




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