Problem svgcoat2 SNF 2011-04-24 16:30:47: HPO pins stuck

gsosa at gsosa at
Mon Apr 25 10:32:11 PDT 2011

Both motor mounts on the hotplate lift assembly were broken. Removed and replaced the lift motor assembly. Performed HPO pin calibration. Tested bake plate operation. Purged 6312 resist and tested 1.0 micron process. Spin quality looks food on 3 wafres. System OK to use.

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