Problem svgcoat2 SNF 2011-04-22 16:22:14: SVG track2 incomplete PR coverage

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Mon Apr 25 10:32:22 PDT 2011


Both motor mounts on the hotplate lift assembly were broken. Removed and replaced the lift motor assembly. Performed HPO pin calibration. Tested bake plate operation. Purged 6312 resist and tested 1.0 micron process. Spin quality looks food on 3 wafres. System OK to use.




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